Series GFM Gas Mass Flow Meter

Flow Range Up to 1000 L/min, Pressures Up to 500 psi, NIST Traceable

Series GFM Gas Mass Flow Meters combine a straight tube sensor with a restrictor flow element to provide high accuracy and repeatability. Flow rates are virtually unaffected by temperature and pressure variations. Actual gas flow is displayed in engineering units on a 3-1/2 digit, 90° tiltable LCD readout. Units can be used with Series GFT Flow Totalizer for applications requiring totalization. Series GFM includes a NIST traceable certificate.

Note: These units require a cable, see GFM-CBL4 or GFM-CBL5, depending on your needs.

Models & Ordering

Filter By

Build Your Custom Part. Use our Product Configurator

Model Number Description Usually Ships Price Code Order
GFM-1101 Gas mass flow meter, range 0-10 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $648.00 N Order
GFM-1102 Gas mass flow meter, range 0-20 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $648.00 N Order
GFM-1103 Gas mass flow meter, range 0-50 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $648.00 N Order
GFM-1104 Gas mass flow meter, range 0-100 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $648.00 N Order
GFM-1105 Gas mass flow meter, range 0-200 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $648.00 N Order
GFM-1106 Gas mass flow meter, range 0-500 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $648.00 N Order
GFM-1107 Gas mass flow meter, range 0-1000 mL/m. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $648.00 N Order
GFM-1108 Gas mass flow meter, range 0-2 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $648.00 N Order
GFM-1109 Gas mass flow meter, range 0-5 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $648.00 N Order
GFM-1111 Gas mass flow meter, range 0-15 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $829.00 N Order
GFM-1131 Gas mass flow meter, range 0-30 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $829.00 N Order
GFM-1133 Gas mass flow meter, range 0-50 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/4" compression fitting. 3-4 Weeks $829.00 N Order
GFM-1142 Gas mass flow meter, range 0-100 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 3/8" compression fitting. 3-4 Weeks $1,018.00 N Order
GFM-1143 Gas mass flow meter, range 0-200 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 3/8" compression fitting. 3-4 Weeks $1,232.00 N Order
GFM-1144 Gas mass flow meter, range 0-500 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 1/2" compression fitting. 3-4 Weeks $1,314.00 N Order
GFM-1145 Gas mass flow meter, range 0-1000 LPM. Specified flow range is for an equivalent flow of nitrogen at 70°F (21°C) @ 760 mm Hg, 3/4" compression fitting. 3-4 Weeks $1,477.00 N Order

Can't find what you need? Try our Product Configurator

Specifications

Service:
Clean gases compatible with wetted parts.
Wetted Materials:
GFM-1XXX: anodized aluminum, brass, 316 SS and fluoroelastomer o-rings; GFM-2XXX: 316 SS and fluoroelastomer o-rings.
Accuracy:
±1.5% FS including linearity over 59 to 77°F (5 to 25°C) and 5 to 60 psia (0.35 to 4 bar).
Repeatability:
±0.5% of full scale.
Response Time:
2 seconds to within ±2% of actual flow.
Output:
Linear 0-5 VDC and 4-20 mA.
Maximum Particulate Size:
5 microns.
Temperature Limits:
32 to 122°F (0 to 50°C).
Power Supply:
12-26 VDC.
Process Connections:
1/4" compression fitting for flow rates ≤50 L/m; 3/8" for 100 and 200 L/m; 1/2" for 500 L/min; 3/4" for 1000 L/min.
Pressure Limits:
500 psig (34.5 bar).
Leak Integrity:
1 x 10-7 sccs of Helium.
Display:
90° tiltable, 3-1/2 digit.
Agency Approvals:
CE.

Accessories

Model Number Description Usually Ships Price Code Order
GFM-110P 110 V power supply. Same Day $52.50 N Order
GFM-220PE 220 V power supply. 3-4 Weeks $77.00 N Order
GFM-CBL4 3 ft cable for 4-20 mA output. 3-4 Weeks $37.25 N Order
GFM-CBL5 4 ft cable for 0-5 VDC output. 3-4 Weeks $37.25 N Order

Model Chart

EXAMPLE GFM 11 00 0.50 CCL2FCCLF2 24VDC Series GFC-1100-0.50-CCL2FCCLF2-24VDC Gas Mass Flow Meter, aluminum, 0.50 LPM Trichloro, with 24 VDC option.
SERIES GFM           Gas Mass Flow Meter
MATERIAL   11
21
        Aluminum
SST
RANGE     00
01
02
03
04
05
06
07
08
09
11
31
33
42
43
44
45
      No Range for Specialty Gas Only
10 SCCM Nitrogen
20 SCCM Nitrogen
50 SCCM Nitrogen
100 SCCM Nitrogen
200 SCCM Nitrogen
500 SCCM Nitrogen
1 LPM Nitrogen
2 LPM Nitrogen
5 LPM Nitrogen
15 LPM Nitrogen
30 LPM Nitrogen
50 LPM Nitrogen
100 LPM Nitrogen
200 LPM Nitrogen
500 LPM Nitrogen
1000 LPM Nitrogen
RANGE OF
SPECIALTY GAS
      XX.X     Desired Flow of Gas (in LPM)
SPECIALTY GAS
K FACTOR AND
DESIRED GAS
        CCL2FCCLF2
C2H2F2
C4H6
C4H8
C3H12
C4H8CIS
C4H8TRANS
C2H2
AIR
NH3
AR
ASH3
BR3
BCL3
BF3
BR2
BRF5
BRF3
CBRF3
C4H10
CO2
CS2
CO
CCL4
COF2
COS
CL2
CLF3
CHCLF2
CHCL3
C2CLF5
CCLF3
C2N2
CICN
C3H5
D2
B2H6
CBR2F2
CHCL2f
CCL2F2
(CH3) 2SICL2
SIH2CL2
(CH3) 2O
(CH3) 2NH
C2H6
C2H6O
C2H5CL
C2H4
C2H4O
F2
CHF3
CCL3F
CCL2FCCLF2
C2H2F2
C2CL2F4
C2CLF5
C2F6
CCL2F2
CCLF3
CBRF3
CF4
CHCL2F
CHCLF2
CHF3
C4F6
GEH4
GECL4
HE
C2F6
C6H14
H2
HBR
HCL
HCN
HF
HI
H2SE
H2S
IF5
CH (CH3) 3
KR
CH4
CH3
C3H4
CH2BR
CH3CL
CH3F
CH3SH
(CH3) SICL3
MOF6
C2H5NH2
CH3NH2
NE
NO
N2
NO2
NF3
NOCL
N20
C4F6
02
OF2
OZONE
B5H9
C5H12
CLO3F
C3F8
COCL2
PH3
POCL3
PH5
PCL3
C3H8
C3H6
SIH4
SICL4
SIF4
SO2
SF6
SO2F2
CF3CH2F
N2F4
TICL4
C2HCL3
CCL3F
SIHCL3
(C4H9) AL
(CH3) 3N
WF6
UF6
CH2CHBR
CH2CHCL
XE
  0.2031 1,1,2 - Trichloro - 1,2,2 Trifluoroethane (Freon - 113)
0.4271 1,1 - Difluoroethylene (Freon - 1132A)
0.3224 1,3 - Butadiene
0.2994 1 - Butane
0.2170 2,2 - Dimethylpropane
0.3240 2 - Butane
0-2910 2 - Butane
0.529 Acetylene
1.0000 Air
0.7310 Ammonia
1.4573 Argon
0.6735 Arsine
0.3800 Boron Tribromide
0.4089 Boron Trichloride
0.5082 Boron Triflouride
0.8083 Bromine
0.2600 Bromine Pentaflouride
0.3855 Bromine Triflouride
0.3697 Bromotrifluoromethane (Freon - 13B1)
0.2631 Butane
0.7382 Carbon Dioxide
0.6026 Carbon Disulfide
1.0000 Carbon Monoxide
0.3100 Carbon Tetrachloride
0.5428 Carbonyl Fluoride
0.6606 Carbonyl Sulfide
0.8600 Chlorine
0.4016 Chlorine Triflouride
0.4589 Chlorodifluoromethane (Freon - 22)
0.3912 Chloroform
0.2418 Chloropentafluoroethane (Freon - 115)
0.3834 Chlorodifluoromethane (Freon - 13)
0.6100 Cyanogen
0.6130 Cyanogen chloride
0.4584 Cyclopropane
1.0000 Deuterium
0.4357 Diborane
0.1947 Dibromodifluoromethane
0.4252 Dichlofluoromethane (Freon -21)
0.3538 Dichlorodifluoromethane (Freon 12)
0.2522 Dichloromethylsilane
0.4044 Dichlorosilane
0.3896 Dimethyl Ether
0.3714 Dimethylamine
0.5000 Ethane
0.3918 Ethanol
0.3891 Ethyl Chloride
0.6000 Ethylene
0.5191 Ethylene Oxide
0.9784 Fluorine
0.4967 Fluoroform (Freon - 23)
0.3287 Freon -11
0.2031 Freon - 113
0.4271 Freon - 1132A
0.2240 Freon - 114
0.2418 Freon - 115
0.2421 Freon - 116
0.3538 Freon - 12
0.3834 Freon - 13
0.3697 Freon - 13B1
0.4210 Freon - 14
0.4252 Freon - 21
0.4589 Freon - 22
0.4967 Freon - 23
0.1760 Freon - C318
0.5696 Germane
0.2668 Germanium Tetrachloride
1.4540 Helium
0.2421 Hexafluoroethane (Freon - 116)
0.1792 Hexane
1.0106 Hydrogen
1.0000 Hydrogen Bromide
1.0000 Hydrogen Chloride
1.0700 Hydrogen Cyanide
0.9998 Hydrogen Fluoride
0.9987 Hydrogen Iodide
0.7893 Hydrogen Selenide
0.8000 Hydrogen Sulfide
0.2492 Iodine Pentaflouride
0.2700 Isobutane
1.4530 Krypton
0.7175 Methane
0.5843 Methanol
0.4313 Methyl Acetylene
0.5835 Methyl Bromide
0.6299 Methyl Chloride
0.6800 Methyl Fluoride
0.5180 Methyl Mercaptan
0.2499 Methyl Trichlorosilane
0.2126 Molybdenum Hexafluoride
0.3512 Monoethylamine
0.5100 Monomethylamine
1.4600 Neon
0.9900 Nitric Oxide
1.0000 Nitrogen
0.7370 Nitrogen Dioxide
0.4802 Nitrogen Triflouride
0.6134 Nitrosyl Chloride
0.7128 Nitrous Oxide
0.1760 Octafluorocyclobutane (Freon - C318)
0.9926 Oxygen
0.6337 Oxygen Difluoride
0.4460 Ozone
0.2554 Pentaborane
0.2134 Pentane
0.3950 Perchloryl Fluoride
0.1740 Perfluoropropane
0.4438 Phosgene
1.0700 Phosphine
0.3600 Phosphorous Oxychloride
0.3021 Phosphorous Pentaflouride
0.3000 Phosphorous Trichloride
0.3500 Propane
0.4000 Propylene
0.5982 Silane
0.2840 Silicon Tetrachloride
0.3482 Silicone Tetrafluoride
0.6900 Sulfur Dioxide
0.2635 Sulfur Hexafluoride
0.3883 Sulfuryl Fluoride
0.5096 Tetrafluoroethane (Forane - 134A)
0.3237 Tetrafluorohydrazine
0.2691 Titanium Tetrachloride
0.3200 Trichloro Ethylene
0.3287 Trichlorofluoromethane (Freon - 11)
0.3278 Trichlorosilane
0.0608 Triisobutyl Aluminum
0.2792 Trimethylamine
0.2541 Tungsten Hexafluoride
0.1961 Uranium Hexafluoride
0.4616 Vinyl Bromide
0.4800 Vinyl Chloride
1.4400 Xenon
OPTIONS           -24VDC
-B
-E
-K
-SPCL
24 VDC
Buna-N O'rings
EPR/EPDM O'rings
Perfluoroelastomer O'rings
Special Cleaning

Product Literature

Manuals

Catalog Pages

Drawings

Questions

Question
What is the difference between a Gas Mass Flow Meter to a Gas Mass Flow Controller?
Answer
The major difference between the GFM and the GFC is the that GFM is just used to measure the flow going through the meter. The GFC has the added feature of a motorized valve to control the flow to a desired set rate. Our newer GFM flowmeters (GFM2, GFM3, and GFM4) have some added features to the base GFM unit, such as optional relays, push button configuration, and pressure and temperature monitoring, respectively.

Photo Downloads

You must be logged in to view this content.
Click here to login to your account.

Feedback

Close[X]